公开(公告)号：US20210020410A1

公开(公告)日：2021-01-21

申请号：US16591139

申请日：2019-10-02

Applicant: APPLIED MATERIALS, INC.

Inventor： MICHAEL NICHOLS ,  TINA DHEKIAL-PHUKAN ,  VENKATA RAVISHANKAR KASIBHOTLA ,  AJIT BALAKRISHNA ,  SANGGYUM KIM

IPC: H01J37/32 ,  H01L21/67

Abstract: Methods and systems for processing substrates are provided. The system can include: a processing chamber configured to process a substrate based on a recipe; a plurality of sub-systems in operable communication with the processing chamber for controlling corresponding parameters associated with processing the substrate; and a controller in operable communication with the processing chamber and each of the plurality of sub-systems and configured to control each of the plurality of sub-systems and the processing chamber using information included in the recipe and feedback provided by at least one of the plurality of sub-systems. The controller is configured to compare information included in the recipe and feedback provided by at least one of the plurality of sub-systems with stored empirical information relating to the recipe and each of the plurality of sub-systems, and adjust at least one of the corresponding parameters associated with processing the substrate based on a determined comparison.