公开(公告)号：US09488924B2

公开(公告)日：2016-11-08

申请号：US14149677

申请日：2014-01-07

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Mariano Abramson ,  Hadar Mazaki ,  Erez Admoni ,  Israel Avneri

IPC: G03B27/42 ,  G03F7/20 ,  H01L21/67 ,  H01L21/677

CPC classification number: G03F7/70916 ,  H01L21/67028 ,  H01L21/6776

Abstract: A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.

Abstract translation: 一种系统，其可以包括机械台，所述机械台被布置成通过所述光学模块在所述物体的照明期间沿着与光学模块相关的预定路径移动物体; 布置成支撑所述光学模块的至少一部分的结构支撑元件; 气体流动模块，其布置成通过气流模块开口将清洁气体引向物体，所述气流模块开口限定了（a）比物体大的覆盖区域，并且（b）直接位于物体的至少大部分上方， 物体位于沿着预定路径的任何地方。

公开(公告)号：US20150192868A1

公开(公告)日：2015-07-09

申请号：US14149677

申请日：2014-01-07

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Mariano Abramson ,  Hadar Mazaki ,  Erez Admoni ,  Israel Avneri

IPC: G03F7/20 ,  H01L21/677 ,  H01L21/02

CPC classification number: G03F7/70916 ,  H01L21/67028 ,  H01L21/6776

Abstract: A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.

Abstract translation: 一种系统，其可以包括机械台，所述机械台被布置成通过所述光学模块在所述物体的照明期间沿着与光学模块相关的预定路径移动物体; 布置成支撑所述光学模块的至少一部分的结构支撑元件; 气体流动模块，其布置成通过气流模块开口将清洁气体引向物体，所述气流模块开口限定了（a）比物体大的覆盖区域，并且（b）直接位于物体的至少大部分上方， 物体位于沿着预定路径的任何地方。