公开(公告)号：US20160290786A1

公开(公告)日：2016-10-06

申请号：US14676571

申请日：2015-04-01

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yuval GRONAU ,  Chun-Hsiang YEN ,  Barak DEE-NOOR

IPC: G01B11/00 ,  H01L21/67 ,  H01L21/687 ,  F16M11/42

CPC classification number: G01B11/002 ,  F16M11/42 ,  H01L21/67248 ,  H01L21/68764

Abstract: A system that may include a movable support module for supporting an object and a controller, wherein the controller is configured to: receive an estimated location of a movable support module that supports an object and temperature information about an actual or estimated temperature of at least a portion of the object support module; and calculate movable support module location information, in response to (a) the estimated location of the movable support module, (b) the temperature information, and (c) a mapping between (i) values of the temperature information, (ii) estimated locations of the movable support module, and (iii) location errors of the movable support module

Abstract translation: 一种可以包括用于支撑物体和控制器的可移动支撑模块的系统，其中所述控制器被配置为：接收支撑物体的可移动支撑模块的估计位置和关于至少一个 对象支持模块的一部分; 并响应于（a）可移动支撑模块的估计位置，（b）温度信息，和（c）（i）温度信息值之间的映射，（ii）估计的可移动支撑模块位置信息 可移动支撑模块的位置，和（iii）可移动支撑模块的位置误差