公开(公告)号：US11022565B2

公开(公告)日：2021-06-01

申请号：US16405920

申请日：2019-05-07

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Dror Shemesh ,  Eugene T. Bullock ,  Adi Boehm ,  Gurjeet Singh

IPC: G01N21/00 ,  G01N21/95 ,  G01N21/88

Abstract: A method for determining a defect material element, the method includes (a) acquiring, by a charged particle beam system and by applying a spectroscopy process, an electromagnetic emission spectrum of a part of a defect; (b) acquiring, by the charged particle beam system, a backscattered electron (BSE) image of an area that includes the defect; and (c) determining a defect material element. The determining of the defect material element includes: determining whether an ambiguity exists in the electromagnetic emission spectrum, and resolving the ambiguity based on the BSE image, when it is determined that the ambiguity exists.