公开(公告)号：US11189451B2

公开(公告)日：2021-11-30

申请号：US17110167

申请日：2020-12-02

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Itay Asulin ,  Ofer Yuli ,  Lavy Shavit ,  Yoram Uziel ,  Guy Eytan ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Jacob Levin ,  Israel Avneri

IPC: H01J1/92 ,  H01J1/304 ,  H01J9/02 ,  H01J9/18

Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.

公开(公告)号：US10886092B2

公开(公告)日：2021-01-05

申请号：US16839986

申请日：2020-04-03

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Itay Asulin ,  Ofer Yuli ,  Lavy Shavit ,  Yoram Uziel ,  Guy Eytan ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Jacob Levin ,  Israel Avneri

IPC: H01J1/92 ,  H01J1/304 ,  H01J9/02 ,  H01J9/18

Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.

公开(公告)号：US20200234907A1

公开(公告)日：2020-07-23

申请号：US16839986

申请日：2020-04-03

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Itay Asulin ,  Ofer Yuli ,  Lavy Shavit ,  Yoram Uziel ,  Guy Eytan ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Jacob Levin ,  Israel Avneri

IPC: H01J1/92 ,  H01J1/304 ,  H01J9/02 ,  H01J9/18

Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.

公开(公告)号：US20210175040A1

公开(公告)日：2021-06-10

申请号：US17110167

申请日：2020-12-02

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Itay Asulin ,  Ofer Yuli ,  Lavy Shavit ,  Yoram Uziel ,  Guy Eytan ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Jacob Levin ,  Israel Avneri

IPC: H01J1/92 ,  H01J9/02 ,  H01J1/304 ,  H01J9/18

Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.