公开(公告)号：US20160163570A1

公开(公告)日：2016-06-09

申请号：US15040904

申请日：2016-02-10

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Michael R. Rice ,  Paul Reuter ,  William (Ty) Weaver ,  Travis Morey ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67126 ,  H01L21/67748 ,  H01L21/67751 ,  H01L21/68714

Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.

Abstract translation: 根据本发明的实施例，提供了一种系统，包括：第一室; 第二个房间 一个卡盘 运动系统; 其中所述第一室包括：具有第一表面的第一元件; 包括第二表面的第一腔室; 其中所述第一表面和所述第二表面在第一界面处彼此接近; 用于当所述卡盘位于所述第一腔室内时支撑所述卡盘的支撑元件; 以及第一动态密封件，其形成在所述第一界面处并且被布置成将所述第一腔室与所述运动系统密封; 其中所述第二腔室包括：第二腔室壳体; 运动系统，被布置成引入（a）第一室壳体和（b）第一元件和卡盘之间的运动; 以及用于将第一元件机械地联接到移动系统的移动控制元件。

公开(公告)号：US10056274B2

公开(公告)日：2018-08-21

申请号：US15040904

申请日：2016-02-10

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Michael R. Rice ,  Paul Reuter ,  William (Ty) Weaver ,  Travis Morey ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni

IPC: H01L21/67 ,  H01L21/68 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67126 ,  H01L21/67748 ,  H01L21/67751 ,  H01L21/68714

Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.