公开(公告)号：US20160163570A1

公开(公告)日：2016-06-09

申请号：US15040904

申请日：2016-02-10

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Michael R. Rice ,  Paul Reuter ,  William (Ty) Weaver ,  Travis Morey ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni

IPC: H01L21/67 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67126 ,  H01L21/67748 ,  H01L21/67751 ,  H01L21/68714

Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.

Abstract translation: 根据本发明的实施例，提供了一种系统，包括：第一室; 第二个房间 一个卡盘 运动系统; 其中所述第一室包括：具有第一表面的第一元件; 包括第二表面的第一腔室; 其中所述第一表面和所述第二表面在第一界面处彼此接近; 用于当所述卡盘位于所述第一腔室内时支撑所述卡盘的支撑元件; 以及第一动态密封件，其形成在所述第一界面处并且被布置成将所述第一腔室与所述运动系统密封; 其中所述第二腔室包括：第二腔室壳体; 运动系统，被布置成引入（a）第一室壳体和（b）第一元件和卡盘之间的运动; 以及用于将第一元件机械地联接到移动系统的移动控制元件。

公开(公告)号：US10056274B2

公开(公告)日：2018-08-21

申请号：US15040904

申请日：2016-02-10

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Michael R. Rice ,  Paul Reuter ,  William (Ty) Weaver ,  Travis Morey ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni

IPC: H01L21/67 ,  H01L21/68 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67126 ,  H01L21/67748 ,  H01L21/67751 ,  H01L21/68714

Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.

公开(公告)号：US20150075659A1

公开(公告)日：2015-03-19

申请号：US14456258

申请日：2014-08-11

Applicant: Applied Materials Israel, Ltd.

Inventor： Michael R. Rice ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni ,  Paul Reuter ,  William (Ty) Weaver

IPC: F16K3/16 ,  F16K31/124 ,  F16K3/02

CPC classification number: F16K3/0236 ,  F16K3/0227 ,  F16K3/188 ,  F16K25/02 ,  F16K39/04 ,  F16K51/02 ,  Y10T137/877

Abstract: According to an embodiment of the invention, there is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.

Abstract translation: 根据本发明的实施例，提供了一种狭缝阀，包括：第一狭缝阀部分，其具有穿过其中的第一窗口，第一窗口的尺寸设定成允许物体通过第一窗口; 其中所述第一窗口被所述第一狭缝阀部分的第一区域包围; 第二狭缝阀部分，其包括第一密封元件和第一定位模块; 其中所述第一定位模块被布置成相对于所述第一窗口移动所述第一密封元件; 其中所述第一和第二狭缝阀部分的至少一个狭缝阀部分包括用于发射加压气体的至少一个第一气体开口，以便当所述第一和第二狭缝阀部分在所述第一和第二狭缝阀部分的所述第一和第二密封元件之间产生第一气垫时， 密封元件被放置成与第一窗口相邻，从而在第一和第二狭缝阀部分之间形成密封。

公开(公告)号：US09587749B2

公开(公告)日：2017-03-07

申请号：US14456258

申请日：2014-08-11

Applicant: Applied Materials Israel, Ltd.

Inventor： Michael R. Rice ,  Natan Schlimoff ,  Igor Krivts (Krayvitz) ,  Israel Avneri ,  Yoram Uziel ,  Erez Admoni ,  Paul Reuter ,  William (Ty) Weaver

IPC: F16K3/00 ,  F16K25/00 ,  F16K3/02 ,  F16K39/04 ,  F16K25/02 ,  F16K51/02 ,  F16K3/18

CPC classification number: F16K3/0236 ,  F16K3/0227 ,  F16K3/188 ,  F16K25/02 ,  F16K39/04 ,  F16K51/02 ,  Y10T137/877

Abstract: There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.

Abstract translation: 提供了一种狭缝阀，包括：第一狭缝阀部分，其具有穿过其中的第一窗口，第一窗口的尺寸设定成允许物体通过第一窗口; 其中所述第一窗口被所述第一狭缝阀部分的第一区域包围; 第二狭缝阀部分，其包括第一密封元件和第一定位模块; 其中所述第一定位模块被布置成相对于所述第一窗口移动所述第一密封元件; 其中所述第一和第二狭缝阀部分的至少一个狭缝阀部分包括用于发射加压气体的至少一个第一气体开口，以便当所述第一和第二狭缝阀部分在所述第一和第二狭缝阀部分的所述第一和第二密封元件之间产生第一气垫时， 密封元件被放置成与第一窗口相邻，从而在第一和第二狭缝阀部分之间形成密封。