公开(公告)号：US3562033A

公开(公告)日：1971-02-09

申请号：US3562033D

申请日：1968-02-12

Applicant: ASEA AB

Inventor： JANSEN JURI ,  RYMAN LENNART

IPC: C30B31/06 ,  H01L21/00 ,  H01L21/223 ,  H01L7/36 ,  H01L7/44

CPC classification number: H01L21/00 ,  C30B31/06 ,  H01L21/223 ,  Y10S252/951 ,  Y10S438/909

Abstract: METHOD OF DIFFUSING A DOPING SUBSTANCE FROM GROUP III OF THE PERIODIC SYSTEM INTO SILICON DISCS FOR SEMI-CONDUCTOR DEVICES, IN WHICH THE SILICON DISCS ARE SUBJECTED BOTH TO THE ACTION OF VAPOR FROM THE DOPING SUBSTANCE AND TO THE ACTION OF A HALOGEN.