公开(公告)号：US20210225688A1

公开(公告)日：2021-07-22

申请号：US17141610

申请日：2021-01-05

Applicant: ASM IP HOLDING B.V.

Inventor： Matthew Goodman ,  Thomas John Kirschenheiter ,  Kevin Eugene Quinn

IPC: H01L21/687 ,  H01L21/02 ,  H01L21/67 ,  C30B25/12 ,  C30B29/06 ,  C23C16/24 ,  C23C16/458

Abstract: The present disclosure relates to a susceptor having a generally circular body having a face with a radially inward section and a radially outward section which includes a substrate supporting surface elevated relative to the radially inward section. A sidewall surrounds the substrate supporting surface which upon retention of a substrate on the radially outward section, the sidewall surrounds the substrate. The sidewall includes a plurality of humps which protrude from the top surface of the sidewall. Advantageously, the plurality of humps may aid in even thickness of deposition of material at the edge of the substrate.

公开(公告)号：US11594444B2

公开(公告)日：2023-02-28

申请号：US17141610

申请日：2021-01-05

Applicant: ASM IP HOLDING B.V.

Inventor： Matthew Goodman ,  Thomas John Kirschenheiter ,  Kevin Eugene Quinn

IPC: C30B25/10 ,  H01L21/687 ,  H01L21/02 ,  C23C16/458 ,  C30B25/12 ,  C30B29/06 ,  C23C16/24 ,  H01L21/67

Abstract: The present disclosure relates to a susceptor having a generally circular body having a face with a radially inward section and a radially outward section which includes a substrate supporting surface elevated relative to the radially inward section. A sidewall surrounds the substrate supporting surface which upon retention of a substrate on the radially outward section, the sidewall surrounds the substrate. The sidewall includes a plurality of humps which protrude from the top surface of the sidewall. Advantageously, the plurality of humps may aid in even thickness of deposition of material at the edge of the substrate.