公开(公告)号：US20230054779A1

公开(公告)日：2023-02-23

申请号：US17887646

申请日：2022-08-15

Applicant: ASM IP Holding B.V.

Inventor： Eric Shero ,  Abhishek Mangoli ,  Harihara Krishnan Krishnamoorthy ,  Daniel Maurice ,  Julio Cesar Diaz ,  Massood Mostaghimi

IPC: H01L21/687 ,  H01L21/67 ,  H01L21/66

Abstract: A reactor system with stuck lift pin detection. The system includes a reaction chamber, a susceptor for supporting wafers in an interior space of the reaction chamber, and an elevator for raising and lowering the susceptor in the interior space. Further, the system includes a lift pin supported by and extending vertically through the susceptor to travel between an up and a down position with movements of the susceptor by the elevator, and a landing pad is provided in the system for receiving a base of the lift pin when the lift pin is in the down position. Significantly, the system also includes a sensor assembly with a sensor positioned at least partially within the interior space of the reaction chamber. An output signal of the sensor is indicative of whether the lift pin is sticking or seizing during travel through the susceptor.

公开(公告)号：US12249534B2

公开(公告)日：2025-03-11

申请号：US17887646

申请日：2022-08-15

Applicant: ASM IP Holding B.V.

Inventor： Eric Shero ,  Abhishek Mangoli ,  Harihara Krishnan Krishnamoorthy ,  Daniel Maurice ,  Julio Cesar Diaz ,  Massood Mostaghimi

IPC: H01L21/687 ,  H01L21/66 ,  H01L21/67

Abstract: A reactor system with stuck lift pin detection. The system includes a reaction chamber, a susceptor for supporting wafers in an interior space of the reaction chamber, and an elevator for raising and lowering the susceptor in the interior space. Further, the system includes a lift pin supported by and extending vertically through the susceptor to travel between an up and a down position with movements of the susceptor by the elevator, and a landing pad is provided in the system for receiving a base of the lift pin when the lift pin is in the down position. Significantly, the system also includes a sensor assembly with a sensor positioned at least partially within the interior space of the reaction chamber. An output signal of the sensor is indicative of whether the lift pin is sticking or seizing during travel through the susceptor.

公开(公告)号：USD1059311S1

公开(公告)日：2025-01-28

申请号：US29803622

申请日：2021-08-13

Applicant: ASM IP Holding B.V.

Designer： Todd Dunn ,  Abhishek Mangoli ,  Ruchik Bhatt