公开(公告)号：US20230069139A1

公开(公告)日：2023-03-02

申请号：US17896218

申请日：2022-08-26

Applicant: ASM IP Holding B.V.

Inventor： Ippei Yanagisawa ,  Chiao Yin Nien

IPC: C23C16/44 ,  C23C16/513

Abstract: A CVD apparatus includes a chamber, a susceptor, an entry/takeout port for a substrate, and a gate valve provided at the entry/takeout port, in which the susceptor has a mounting plate and a support, the entry/takeout port is provided on a part of a side of the chamber, and is provided in a range from an inner bottom surface of the chamber to a position corresponding to the lower surface of the mounting plate when the susceptor is located at an upper end in the vertical direction, and the inner bottom surface of the chamber, the range from the inner bottom surface of the chamber to the position corresponding to the lower surface of the mounting plate when the susceptor is located at the upper end in the vertical direction, the lower surface of the mounting plate, and the outer side surface of the support are coated with ceramic liners.