公开(公告)号：US20240145262A1

公开(公告)日：2024-05-02

申请号：US18495323

申请日：2023-10-26

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G.M. Oosterlaken ,  Kelly Houben ,  Herbert Terhorst ,  Cornelis Herbschleb

IPC: H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67017 ,  H01L21/02277

Abstract: A gas injector assembly and a substrate processing apparatus comprising the gas injector assembly is disclosed. Embodiments of the presently described gas injector assembly comprise a gas injector, a first precursor gas supply conduit and a second precursor gas supply conduit. A size of the first precursor gas supply conduit is larger than the size of the second precursor gas supply conduit.