公开(公告)号：US20240360554A1

公开(公告)日：2024-10-31

申请号：US18648094

申请日：2024-04-26

Applicant: ASM IP Holding B.V.

Inventor： Davide Proserpio ,  Theodorus G.M. Oosterlaken ,  Herbert Terhorst ,  Didem Ernur

IPC: C23C16/448 ,  C23C16/08 ,  C23C16/458 ,  C23C16/54

CPC classification number: C23C16/4481 ,  C23C16/08 ,  C23C16/4587 ,  C23C16/54

Abstract: A solid source chemical vaporizer, an assembly of solid source chemical vaporizers, a substrate processing system comprising the solid source chemical vaporizer or the assembly and a method of forming a layer is disclosed. Embodiments of the presently described solid source chemical vaporizer comprise a vessel, a gas inlet, a gas outlet and a channel.

公开(公告)号：US20250092520A1

公开(公告)日：2025-03-20

申请号：US18889183

申请日：2024-09-18

Applicant: ASM IP Holding B.V.

Inventor： Davide Proserpio ,  Dieter Pierreux ,  Theodorus G.M. Oosterlaken ,  Herbert Terhorst

IPC: C23C16/455 ,  C23C16/06 ,  C23C16/52

Abstract: In general, the various aspects of the technology of the present disclosure relate to semiconductor manufacturing apparatuses and processes which may comprise two or more accumulators connected in parallel to each other. The apparatus may have a solid-state precursor sublimator upstream from said two or more accumulators employed by the process.