公开(公告)号：US20240044003A1

公开(公告)日：2024-02-08

申请号：US18362404

申请日：2023-07-31

Applicant: ASM IP Holding B.V.

Inventor： Dieter Pierreux ,  Bert Jongbloed ,  Didem Ernur

IPC: C23C16/458 ,  H01L21/3205

CPC classification number: C23C16/4583 ,  H01L21/32055 ,  C23C16/4581

Abstract: A wafer boat and a method for forming a layer on a plurality of substrates that are provided in the wafer boat is disclosed. Aspects of the presently described wafer boat comprise at least two wafer boat rods, each of which including at least a first set of slots for holding a plurality of substrates. The wafer boat further includes a plurality of plates, whereby at least one slot of the at least first set of slots is provided in between two neighboring plates.

公开(公告)号：US20240360554A1

公开(公告)日：2024-10-31

申请号：US18648094

申请日：2024-04-26

Applicant: ASM IP Holding B.V.

Inventor： Davide Proserpio ,  Theodorus G.M. Oosterlaken ,  Herbert Terhorst ,  Didem Ernur

IPC: C23C16/448 ,  C23C16/08 ,  C23C16/458 ,  C23C16/54

CPC classification number: C23C16/4481 ,  C23C16/08 ,  C23C16/4587 ,  C23C16/54

Abstract: A solid source chemical vaporizer, an assembly of solid source chemical vaporizers, a substrate processing system comprising the solid source chemical vaporizer or the assembly and a method of forming a layer is disclosed. Embodiments of the presently described solid source chemical vaporizer comprise a vessel, a gas inlet, a gas outlet and a channel.