公开(公告)号：US20240110282A1

公开(公告)日：2024-04-04

申请号：US18475002

申请日：2023-09-26

Applicant: ASM IP Holding, B.V.

Inventor： Hideki Yoshida

IPC: C23C16/46 ,  C23C14/50

CPC classification number: C23C16/466 ,  C23C14/50

Abstract: A loadlock assembly is disclosed. Exemplary loadlock assembly includes a loadlock chamber provided with a plurality of sidewalls, a top portion, a bottom portion, and a plurality of openings through which a substrate is configured to be passed into the loadlock chamber; wherein the loadlock chamber is provided with a plurality of cooling gas intake ports; a substrate support disposed in the loadlock chamber and configured to support the substrate at or near an edge of the substrate; and a chiller unit provided with a plurality of cooling gas nozzles coupled to the cooling gas intake ports and configured to provide a cooling gas that passes through the plurality of cooling gas nozzles to the loadlock chamber.

公开(公告)号：US11247330B2

公开(公告)日：2022-02-15

申请号：US16165512

申请日：2018-10-19

Applicant: ASM IP Holding B.V.

Inventor： Hideki Yoshida ,  Masaei Suwada

IPC: B25J15/00 ,  B25J9/16 ,  H01L21/68 ,  H01L21/687 ,  H01L21/67 ,  G05B19/402

Abstract: Examples of a method for teaching a transportation position includes correcting the position of an alignment jig having a plurality of sloping surfaces relative to a susceptor pin projecting upwards from an upper surface of a susceptor by lowering a robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surfaces by virtue of an own weight of the aliment jig, detecting a position of the alignment jig before and after the positional correction of the alignment jig, and correcting a movement destination information by an amount corresponding to a difference between an initial position and a corrected position of the alignment jig.