公开(公告)号：US20240213058A1

公开(公告)日：2024-06-27

申请号：US18392301

申请日：2023-12-21

Applicant: ASM IP Holding B.V.

Inventor： Masaei Suwada ,  Taira Okabe

IPC: H01L21/67

CPC classification number: H01L21/67201 ,  H01L21/67248

Abstract: Load lock assemblies and associated temperature control assemblies are disclosed. The temperature control assemblies are moveably disposed within a load lock chamber body and constructed and arranged to be inserted and extracted from the load lock chamber body.

公开(公告)号：US20160013084A1

公开(公告)日：2016-01-14

申请号：US14327134

申请日：2014-07-09

Applicant: ASM IP Holding B.V.

Inventor： Keisuke Kamata ,  Hiroyuki Sato ,  Kazunori Furukawahara ,  Masaei Suwada ,  Kenkichi Okubo ,  Izumi Arai

IPC: H01L21/67

CPC classification number: H01L21/67109 ,  F27B17/0025 ,  F27B2009/124 ,  H01L21/67775 ,  H01L21/67778

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract translation: 用于加热处理工具上游的基板的预烘烤装置适于连接到EFEM（设备前端模块），并且包括：具有在室的高度方向上布置有多个槽的前表面的室， 并且其分成多个隔室，分别从多个槽延伸到用于装载和卸载基板的室的后端; 以及用于将腔室连接到加工工具的连接框架。 多个隔室通过分隔板彼此分离，并设置有用于加热多个隔室的加热器，并且每个隔间具有气体注入口，用于将热惰性气体吹向放置在其中的基板上。

公开(公告)号：US10403514B1

公开(公告)日：2019-09-03

申请号：US15951882

申请日：2018-04-12

Applicant: ASM IP Holding B.V.

Inventor： Takashi Hagino ,  Masaei Suwada

IPC: H01L21/67 ,  H01L21/677

Abstract: Examples of a substrate transporting system include a substrate transporting robot, a module that houses the substrate transporting robot therein and has an EFEM door, a load port for placing a FOUP having a FOUP door thereon, and a controller for opening the EFEM door while the FOUP door is closed when the FOUP is located at a dock position of the load port.

公开(公告)号：US09349620B2

公开(公告)日：2016-05-24

申请号：US14327134

申请日：2014-07-09

Applicant: ASM IP Holding B.V.

Inventor： Keisuke Kamata ,  Hiroyuki Sato ,  Kazunori Furukawahara ,  Masaei Suwada ,  Kenkichi Okubo ,  Izumi Arai

IPC: F26B11/00 ,  H01L21/67 ,  H01L21/677 ,  F27B9/12

CPC classification number: H01L21/67109 ,  F27B17/0025 ,  F27B2009/124 ,  H01L21/67775 ,  H01L21/67778

Abstract: A pre-baking apparatus for heating a substrate upstream of a process tool is adapted to be connected to an EFEM (equipment front end module) and includes: a chamber which has a front face with multiple slots arranged in a height direction of the chamber, and which is divided into multiple compartments extending from the multiple slots, respectively, toward a rear end of the chamber for loading and unloading substrates; and a connecting frame for connecting the chamber to the process tool. The multiple compartments are separated from each other by a divider plate and provided with heaters for heating the multiple compartments, and each compartment has a gas injection port for blowing a hot inert gas over the substrate placed therein toward the slot.

Abstract translation: 用于加热处理工具上游的基板的预烘烤装置适于连接到EFEM（设备前端模块），并且包括：具有在室的高度方向上布置有多个槽的前表面的室， 并且其分成多个隔室，分别从多个槽延伸到用于装载和卸载基板的室的后端; 以及用于将腔室连接到加工工具的连接框架。 多个隔室通过分隔板彼此分离，并设置有用于加热多个隔室的加热器，并且每个隔间具有气体注入口，用于将热惰性气体吹向放置在其中的基板上。

公开(公告)号：US20250069920A1

公开(公告)日：2025-02-27

申请号：US18806906

申请日：2024-08-16

Applicant: ASM IP Holding B.V.

Inventor： Masaei Suwada ,  Taira Okabe

IPC: H01L21/67

Abstract: Load lock assemblies, semiconductor processing systems including load lock assemblies, and associated methods for regulating the temperature of a substrate within load lock assemblies are disclosed. The load lock assemblies include a temperature control assembly coupled to an elevator, the elevator configured to provide vertical movement to the temperature control assembly within a load lock body.

公开(公告)号：US20230332791A1

公开(公告)日：2023-10-19

申请号：US18302110

申请日：2023-04-18

Applicant: ASM IP Holding, B.V.

Inventor： Masashi Nakano ,  Masaei Suwada

IPC: F24F11/50 ,  H01L21/67 ,  F24F11/00

CPC classification number: F24F11/50 ,  H01L21/67017 ,  F24F11/0001

Abstract: Examples of an interface module include a fan filter unit including a fan and a filter, a housing surrounding a space adjacent to the filter, a discharge system attached to the housing, a substrate support instrument provided in the housing, an upper housing surrounding a space adjacent to the fan, a gas supply system attached to the upper housing, a circulation duct connected to the housing and the upper housing, and a radiator provided between the fan and the filter.

公开(公告)号：US20230022174A1

公开(公告)日：2023-01-26

申请号：US17813960

申请日：2022-07-21

Applicant: ASM IP Holding, B.V.

Inventor： Wataru Kobayashi ,  Masaei Suwada

IPC: H01L21/67 ,  C23C14/54 ,  H01L21/687

Abstract: Examples of a substrate transfer system include a chamber in which a plurality of through holes are formed on a side surface, a substrate transfer device provided in the chamber, and a lamp heater disposed in the chamber. The lamp heater is configured to heat an inner wall of the chamber and the substrate transfer device.

公开(公告)号：US11247330B2

公开(公告)日：2022-02-15

申请号：US16165512

申请日：2018-10-19

Applicant: ASM IP Holding B.V.

Inventor： Hideki Yoshida ,  Masaei Suwada

IPC: B25J15/00 ,  B25J9/16 ,  H01L21/68 ,  H01L21/687 ,  H01L21/67 ,  G05B19/402

Abstract: Examples of a method for teaching a transportation position includes correcting the position of an alignment jig having a plurality of sloping surfaces relative to a susceptor pin projecting upwards from an upper surface of a susceptor by lowering a robot hand to bring one of the sloping surfaces into contact with the susceptor pin and causing the susceptor pin to slide on the sloping surfaces by virtue of an own weight of the aliment jig, detecting a position of the alignment jig before and after the positional correction of the alignment jig, and correcting a movement destination information by an amount corresponding to a difference between an initial position and a corrected position of the alignment jig.