公开(公告)号：US12243757B2

公开(公告)日：2025-03-04

申请号：US17323288

申请日：2021-05-18

Applicant: ASM IP Holding B.V.

Inventor： Jeroen de Jonge ,  Sumit Sachdeva ,  Lucian Jdira ,  Julien Laurentius Antonius Maria Keijser ,  Theodorus G. M. Oosterlaken

IPC: H01L21/67 ,  F27B17/00 ,  F27D5/00 ,  F27D9/00 ,  H01L21/673

Abstract: The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.

公开(公告)号：US20210366742A1

公开(公告)日：2021-11-25

申请号：US17323288

申请日：2021-05-18

Applicant: ASM IP Holding B.V.

Inventor： Jeroen de Jonge ,  Sumit Sachdeva ,  Lucian Jdira ,  Julien Laurentius Antonius Maria Keijser ,  Theodorus G.M. Oosterlaken

IPC: H01L21/67 ,  H01L21/673 ,  F27B17/00 ,  F27D5/00

Abstract: The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.