-
公开(公告)号：US10403514B1
公开(公告)日：2019-09-03
申请号：US15951882
申请日：2018-04-12
Applicant: ASM IP Holding B.V.
Inventor： Takashi Hagino , Masaei Suwada
IPC: H01L21/67 , H01L21/677
Abstract: Examples of a substrate transporting system include a substrate transporting robot, a module that houses the substrate transporting robot therein and has an EFEM door, a load port for placing a FOUP having a FOUP door thereon, and a controller for opening the EFEM door while the FOUP door is closed when the FOUP is located at a dock position of the load port.
Search Results
1
records
(took 0.011 seconds)
筛选
AND
AND
过滤
NOT
NOT
Scan to Join
