公开(公告)号：US20250022729A1

公开(公告)日：2025-01-16

申请号：US18768897

申请日：2024-07-10

Applicant: ASM IP Holding B.V.

Inventor： Senthil Sivaraman ,  Yevgeniy Rabinovich

IPC: H01L21/67

Abstract: Lid moving systems and methods facilitate reliable and safe movement of lids for chambers. Such systems may include: (a) a base member; (b) side walls extending from the base member with each including a cam surface defined therein; (c) a lid mounting arm extending away from the base member; (d) a first pivotal connection system engaging the cam surfaces and pivotally engaging the lid mounting arm; (e) a traveler member including a recess or opening on a surface facing the base member; (f) a second pivotal connection system pivotally engaging the traveler member with the lid mounting arm; (g) a motor for moving the traveler member (causing movement of the lid mounting arm with respect to the side walls); and/or (h) a stopper mechanism extending into the recess or opening of the traveler member from a direction of the surface facing the base member when the lid is opened.