公开(公告)号：US20190179162A1

公开(公告)日：2019-06-13

申请号：US16217424

申请日：2018-12-12

申请人： ASML Holding N.V.

发明人： Douglas C. CAPPELLI ,  Stanislav SMIRNOV ,  Richard Carl ZIMMERMAN ,  Joshua ADAMS ,  Alexander Kenneth RAUB ,  Yevgeniy Konstantinovich SHMAREV

IPC分类号： G02B27/28 ,  G01N21/47 ,  G03F7/20

摘要： According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.

公开(公告)号：US20200326556A1

公开(公告)日：2020-10-15

申请号：US16913698

申请日：2020-06-26

申请人： ASML Holding N.V.

发明人： Douglas C. CAPPELLI ,  Stanislav SMIRNOV ,  Richard Carl ZIMMERMAN ,  Joshua ADAMS ,  Alexander Kenneth RAUB ,  Yevgeniy Konstantinovich SHMAREV

IPC分类号： G02B27/28 ,  G01N21/47 ,  G03F7/20 ,  G01N21/956

摘要： According to one embodiment, a prism system is provided. The prism system includes a polarizing beam splitter (PBS) surface. The PBS surface is configured to generate first and second sub-beams having corresponding first and second polarization information from a received beam, the second polarization information being different than the first polarization information. A first optical path of the first sub-beam within the prism system has substantially same length as a second optical path of the second sub-beam within the prism system. Additionally or alternatively, the first sub-beam achieves a predetermined polarization extinction ratio.