公开(公告)号：US20230089666A1

公开(公告)日：2023-03-23

申请号：US17797421

申请日：2021-01-21

Applicant: ASML Holding N.V.

Inventor： Christopher Michael DOHAN ,  James Hamilton WALSH ,  Roberto B. WIENER

IPC: G01N21/956 ,  G03F7/20

Abstract: A pattering device inspection apparatus, system and method are described. According to one aspect, an inspection method is disclosed, the method including receiving, at a multi-element detector within an inspection system, radiation scattered at a surface of an object. The method further includes measuring, with processing circuitry, an output of each element of the multi-element detector, the output corresponding to the received scattered radiation. Moreover, the method includes calibrating, with the processing circuitry, the multi-element detector by identifying an active pixel area comprising one or more elements of the multi-element detector with a measured output being above a predetermined threshold. The method also includes identifying an inactive pixel area comprising a remainder of elements of the multi-element detector. Additionally, the method includes setting the active pixel area as a default alignment setting between the multi-element detector and a light source causing the scattered radiation.

公开(公告)号：US20230137537A1

公开(公告)日：2023-05-04

申请号：US17918317

申请日：2021-04-01

Applicant: ASML Holding N.V. ,  ASML Netherlands B.V.

Inventor： Michal Emanuel PAWLOWSKI ,  Aage BENDIKSEN ,  Christopher Michael DOHAN ,  Johannes ONVLEE

IPC: G01N21/31 ,  G01N21/956 ,  G03F7/20

Abstract: An inspection system, a lithography apparatus, and an inspection method are provided. The inspection system includes an illumination system, a detection system, and processing circuitry. The illumination system generates a broadband beam and illuminates surface of an object with the broadband illumination beam. The broadband beam has a continuous spectral range. The detection system receives radiation scattered at the surface and by a structure near the surface. The detection system generates a detection signal based on an optical response to the broadband illumination beam. The processing circuitry analyzes the detection signal. The processing circuitry distinguishes between a spurious signal and a signal corresponding to a defect on the surface based on the analyzing The spurious signal is diminished for at least a portion of the continuous spectral range.

公开(公告)号：US20230055116A1

公开(公告)日：2023-02-23

申请号：US17794905

申请日：2021-01-21

Applicant: ASML Holding N.V.

Inventor： Peter Conrad KOCHERSPERGER ,  Christopher Michael DOHAN ,  Justin Lloyd KREUZER ,  Michal Emanuel PAWLOWSKI ,  Aage BENDIKSEN ,  Kirill Urievich SOBOLEV ,  James Hamilton WALSH ,  Roberto B. WIENER ,  Arun Mahadevan VENKATARAMAN

IPC: G03F1/84

Abstract: An inspection system includes a radiation source that generates a beam of radiation and irradiates a first surface of an object, defining a region of the first surface of the object. The radiation source also irradiates a second surface of the object, defining a region of the second surface, wherein the second surface is at a different depth level within the object than the first surface. The inspection system may also include a detector that defines a field of view (FOV) of the first surface including the region of the first surface, and receives radiation scattered from the region of the first surface and the region of the second surface. The inspection system may also include a processor that discards image data not received from the region of the first surface, and constructs a composite image comprising the image data from across the region of the first surface.