公开(公告)号：US20180329311A1

公开(公告)日：2018-11-15

申请号：US15774583

申请日：2016-10-07

Applicant: ASML NETHERLAND B.V.

Inventor： Lin Lee CHEONG ,  Wenjin HUANG ,  Bruno LA FONTAINE

IPC: G03F7/20 ,  G05B19/4097

CPC classification number: G03F7/70625 ,  G03F7/70641 ,  G05B19/4097 ,  G05B2219/45028

Abstract: A method including: determining a value of a characteristic of a patterning process or a product thereof, at a current value of a processing parameter; determining whether a termination criterion is met by the value of the characteristic; if the termination criterion is not met, determining a new value of the processing parameter from the current value of the processing parameter and a prior value of the processing parameter, and setting the current value to the new value and repeating the determining steps; and if the termination criterion is met, providing the current value of the processing parameter as an approximation of a value of the processing parameter at which the characteristic has a target value.