公开(公告)号：US10788765B2

公开(公告)日：2020-09-29

申请号：US16478068

申请日：2018-01-10

Applicant: ASML NETHERLANDS B.V.

Inventor： Stefan Michiel Witte ,  Alessandro Antoncecchi ,  Stephen Edward ,  Hao Zhang ,  Paulus Clemens Maria Planken ,  Kjeld Sijbrand Eduard Eikema ,  Sebastianus Adrianus Goorden ,  Simon Reinald Huisman ,  Irwan Dani Setija

IPC: G03F9/00 ,  G01B11/24 ,  G01B17/06

Abstract: As increasing numbers of layers, using increasing numbers of specific materials, are deposited on substrates, it becomes increasingly difficult to detect alignment marks accurately for, for example, applying a desired pattern onto a substrate using a lithographic apparatus, in part due to one or more of the materials used in one or more of the layers being wholly or partially opaque to the radiation used to detect alignment marks. In a first step, the substrate is illuminated with excitation radiation. In a second step, at least one effect associated with a reflected material effect scattered by a buried structure is measured. The effect may, for example, include a physical displacement of the surface of the substrate. In a third step, at least one characteristic of the structure based on the measured effect is derived.

公开(公告)号：US11042096B2

公开(公告)日：2021-06-22

申请号：US16619803

申请日：2018-05-15

Applicant: ASML Netherlands B.V.

Inventor： Stefan Michiel Witte ,  Alessandro Antoncecchi ,  Hao Zhang ,  Stephen Edward ,  Paulus Clemens Maria Planken ,  Sebastianus Adrianus Goorden ,  Simon Reinald Huisman ,  Irwan Dani Setija ,  David Ferdinand Vles

IPC: G03B27/54 ,  G03F7/20 ,  G03F9/00

Abstract: A method for determining a characteristic of a feature in an object, the feature being disposed below a surface of the object is disclosed. The surface of the object is irradiated with a pulsed pump radiation beam so as to produce an acoustic wave in the object. The surface of the object is then irradiated with a measurement radiation beam. A portion of the measurement radiation beam scattered from the surface is received and a characteristic of the feature in the object is determined from at least a portion of the measurement radiation beam scattered from the surface within a measurement time period. A temporal intensity distribution of the pulsed pump radiation beam is selected such that in the measurement time period a signal to background ratio is greater than a signal to background ratio achieved using a single pulse of the pulsed pump radiation beam. The signal to background ratio is a ratio of: (a) signals generated at the surface by reflections of acoustic waves from the feature to (b) background signals generated at the surface by reflections of acoustic waves which have not reflected from the feature.