-
公开(公告)号：US10948409B2
公开(公告)日：2021-03-16
申请号：US15644072
申请日：2017-07-07
Applicant: ASML Netherlands B.V.
Inventor： Irwan Dani Setija , Petrus Maria Van Den Berg
Abstract: A method of determining electromagnetic scattering properties of a finite periodic structure has the steps: 1002: Calculating a single-cell contrast current density, within a unit-cell supporting domain of a single one of a finite collection of unit cells. 1004: Calculating a scattered electric field outside the finite collection of unit cells, by integrating, over the single unit cell's supporting domain, a Green's function with the determined single-cell contrast current density. 1006: The Green's function is obtained for observation points outside the finite collection of unit cells by summation across the finite collection of unit cells. The Green's function integrated with the determined single-cell contrast current density is obtained for observation points above the supporting domain with respect to a substrate underlying the finite periodic structure. 1008: Determining an electromagnetic scattering property, for example a diffraction pattern, of the finite periodic structure using the calculated scattered electric field.
-
公开(公告)号：US10788765B2
公开(公告)日：2020-09-29
申请号：US16478068
申请日：2018-01-10
Applicant: ASML NETHERLANDS B.V.
Inventor： Stefan Michiel Witte , Alessandro Antoncecchi , Stephen Edward , Hao Zhang , Paulus Clemens Maria Planken , Kjeld Sijbrand Eduard Eikema , Sebastianus Adrianus Goorden , Simon Reinald Huisman , Irwan Dani Setija
Abstract: As increasing numbers of layers, using increasing numbers of specific materials, are deposited on substrates, it becomes increasingly difficult to detect alignment marks accurately for, for example, applying a desired pattern onto a substrate using a lithographic apparatus, in part due to one or more of the materials used in one or more of the layers being wholly or partially opaque to the radiation used to detect alignment marks. In a first step, the substrate is illuminated with excitation radiation. In a second step, at least one effect associated with a reflected material effect scattered by a buried structure is measured. The effect may, for example, include a physical displacement of the surface of the substrate. In a third step, at least one characteristic of the structure based on the measured effect is derived.
-
Patent Agency Ranking
3.发明申请Method and Apparatus for Measuring a Structure on a Substrate, Models for Error Correction, Computer Program Products for Implementing such Methods and Apparatus 有权用于测量基板上的结构的方法和装置，用于误差校正的模型，用于实现这种方法和装置的计算机程序产品公开(公告)号：US20160313653A1
公开(公告)日：2016-10-27
申请号：US15101511
申请日：2014-11-05
Applicant: ASML Netherlands B.V.
Inventor： Martijn Peter Mink , Janne Maria Brok , Irwan Dani Setija
CPC classification number: G03F7/70633 , G01B11/272 , G01B2210/56 , G03F7/705 , G03F7/70625
Abstract: A reconstruction process includes measuring structures formed on a substrate by a lithographic process, determining a reconstruction model for generating modeled patterns, computing and minimizing a multi-variable cost function including model errors. Errors induced by nuisance parameters are modeled based on statistical description of the nuisance parameters' behavior, described by probability density functions. From the statistical description model errors are calculated expressed in terms of average model errors and weighing matrices. These are used to modify the cost function so as to reduce the influence of the nuisance parameters in the reconstruction, without increasing the complexity of the reconstruction model. The nuisance parameters may be parameters of the modeled structure, and/or parameters of an inspection apparatus used in the reconstruction.
Abstract translation: 重建过程包括通过光刻处理测量在衬底上形成的结构，确定用于生成建模图案的重建模型，计算并最小化包括模型误差的多变量成本函数。 基于概率密度函数描述的扰乱参数行为的统计描述，对由扰乱参数引起的误差进行建模。 从统计描述模型计算出的误差是用平均模型误差和称重矩阵表示的。 这些用于修改成本函数，以减少重建中扰动参数的影响，而不会增加重建模型的复杂性。 妨扰参数可以是建模结构的参数，和/或重建中使用的检查装置的参数。
-
公开(公告)号：US10942461B2
公开(公告)日：2021-03-09
申请号：US16639566
申请日：2018-07-02
Applicant: ASML Netherlands B.V.
IPC: G03F9/00
Abstract: An apparatus for determining a characteristic of a feature of an object comprises: a measurement radiation source; a measurement radiation delivery system; a measurement system; a pump radiation source; and a pump radiation delivery system. The measurement radiation source is operable to produce measurement radiation and the measurement radiation delivery system is operable to irradiate at least a part of a top surface of the object with the measurement radiation. The measurement system is operable to receive at least a portion of the measurement radiation scattered from the top surface and is further operable to determine a characteristic of the feature of the object from at least a portion of the measurement radiation scattered from the top surface. The pump radiation source is operable to produce pump radiation and the pump radiation delivery system is operable to irradiate at least a part of the top surface of the object with the pump radiation so as to produce a mechanical response (for example an acoustic wave) in the object.
-
公开(公告)号：US09939250B2
公开(公告)日：2018-04-10
申请号：US15036471
申请日：2014-11-04
Applicant: ASML Netherlands B.V.
Inventor： Maxim Pisarenco , Irwan Dani Setija
CPC classification number: G01B11/02 , G03F7/705 , G03F7/70625 , G03F7/70633
Abstract: In scatterometry, a merit function including a regularization parameter is used in an iterative process to find values for the scattering properties of the measured target. An optimal value for the regularization parameter is obtained for each measurement target and in each iteration of the iterative process. Various methods can be used to find the value for the regularization parameter, including the Discrepancy Principle, the chi-squared method and novel modifications of the Discrepancy Principle and the chi-squared method including a merit function.
-
公开(公告)号：US11042096B2
公开(公告)日：2021-06-22
申请号：US16619803
申请日：2018-05-15
Applicant: ASML Netherlands B.V.
Inventor： Stefan Michiel Witte , Alessandro Antoncecchi , Hao Zhang , Stephen Edward , Paulus Clemens Maria Planken , Sebastianus Adrianus Goorden , Simon Reinald Huisman , Irwan Dani Setija , David Ferdinand Vles
Abstract: A method for determining a characteristic of a feature in an object, the feature being disposed below a surface of the object is disclosed. The surface of the object is irradiated with a pulsed pump radiation beam so as to produce an acoustic wave in the object. The surface of the object is then irradiated with a measurement radiation beam. A portion of the measurement radiation beam scattered from the surface is received and a characteristic of the feature in the object is determined from at least a portion of the measurement radiation beam scattered from the surface within a measurement time period. A temporal intensity distribution of the pulsed pump radiation beam is selected such that in the measurement time period a signal to background ratio is greater than a signal to background ratio achieved using a single pulse of the pulsed pump radiation beam. The signal to background ratio is a ratio of: (a) signals generated at the surface by reflections of acoustic waves from the feature to (b) background signals generated at the surface by reflections of acoustic waves which have not reflected from the feature.
-
公开(公告)号：US09772562B2
公开(公告)日：2017-09-26
申请号：US15101511
申请日：2014-11-05
Applicant: ASML Netherlands B.V.
Inventor： Martijn Peter Mink , Janne Maria Brok , Irwan Dani Setija
CPC classification number: G03F7/70633 , G01B11/272 , G01B2210/56 , G03F7/705 , G03F7/70625
Abstract: A reconstruction process includes measuring structures formed on a substrate by a lithographic process, determining a reconstruction model for generating modeled patterns, computing and minimizing a multi-variable cost function including model errors. Errors induced by nuisance parameters are modeled based on statistical description of the nuisance parameters' behavior, described by probability density functions. From the statistical description model errors are calculated expressed in terms of average model errors and weighing matrices. These are used to modify the cost function so as to reduce the influence of the nuisance parameters in the reconstruction, without increasing the complexity of the reconstruction model. The nuisance parameters may be parameters of the modeled structure, and/or parameters of an inspection apparatus used in the reconstruction.
-
-
-
-
-
-
Search Results
7
records
(took 0.015 seconds)
