公开(公告)号：US10607873B2

公开(公告)日：2020-03-31

申请号：US16086367

申请日：2017-03-23

Applicant: ASML NETHERLANDS B.V.

Inventor： Eric Anthony Janda ,  Cayetano Sánchez-Fabrés Cobaleda ,  Bernd Peter Geh ,  Simon Gijsbert Josephus Mathijssen

IPC: G03F9/00 ,  H01L21/67 ,  H01L21/68 ,  G03F7/20

Abstract: A method including directing, by an optical system, an illumination beam to a surface of a substrate, providing relative motion between the directed illumination beam and the substrate until the directed illumination beam is illuminated on a grating underneath an edge or a notch of the substrate, diffracting, by the grating, at least a portion of the illumination beam, and detecting, by the detector, the diffracted illumination.