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公开(公告)号：US09535340B2
公开(公告)日：2017-01-03
申请号：US14413667
申请日：2013-05-15
CPC分类号： G03F7/70833 , F16C32/0459 , G03F7/70058 , G03F7/704 , G03F7/70816
摘要： A support for a movable element includes a stator element, a gravity compensator field inducing element mounted on the stator element, the gravity compensator field inducing element configured to apply a translational force to the movable element by controlling a magnetic field in a gap between the stator element and the movable element, and a plurality of torque compensator field inducing elements mounted on the stator element, the torque compensator field inducing elements configured to apply a torque to the movable element by controlling a magnetic field in the gap between the stator element and the movable element, the torque being about a first axis substantially perpendicular to the direction of the translational force applied by the gravity compensator field inducing element.
摘要翻译： 可移动元件的支撑件包括定子元件，安装在定子元件上的重力补偿器场感应元件，重力补偿器场引发元件被配置为通过控制定子之间的间隙中的磁场向可移动元件施加平移力 元件和可移动元件以及安装在定子元件上的多个扭矩补偿器场诱导元件，扭矩补偿器场诱导元件被配置为通过控制定子元件和定子元件之间的间隙中的磁场向可移动元件施加扭矩 所述扭矩大约是基本上垂直于由重力补偿器场诱导元件施加的平移力的方向的第一轴线。
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公开(公告)号：US09293951B2
公开(公告)日：2016-03-22
申请号：US13737848
申请日：2013-01-09
发明人： Fidelus Adrianus Boon , Hendrikus Pascal Gerardus Johannes Van Agtmaal , Abdelhamid Kechroud , Sven Antoin Johan Hol , Peter Michel Silvester Maria Heijmans
CPC分类号： H02K1/06 , G03F7/70758
摘要： A lithographic apparatus includes an actuator for producing a force in a first direction between a first and a second part including a first magnet assembly and a second magnet assembly each attached opposite to each other to the first part of the apparatus, the first magnet assembly including a first main magnet system and a first outer subsidiary magnet system, and the second magnet assembly including a second main magnet system and a second outer subsidiary magnet system, the first and second main magnet system defining a space between them in a second direction perpendicular to the first direction. The actuator includes a coil attached to the second part. The distance between the first outer subsidiary magnet system and the second outer subsidiary magnet system in the second direction is substantially zero.
摘要翻译： 光刻设备包括用于在包括第一磁体组件和第二磁体组件的第一和第二部分之间沿第一方向产生力的致动器，每个第一磁体组件和第二磁体组件彼此相对地安装到装置的第一部分，第一磁体组件包括 第一主磁体系统和第一外部辅助磁体系统，第二磁体组件包括第二主磁体系统和第二外部辅助磁体系统，第一和第二主磁体系统在垂直于第二主磁体系统的第二方向上在它们之间限定空间 第一个方向。 致动器包括附接到第二部件的线圈。 第一外辅助磁体系统和第二外辅助磁体系统在第二方向上的距离基本为零。
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公开(公告)号：US20150212430A1
公开(公告)日：2015-07-30
申请号：US14415518
申请日：2013-06-18
CPC分类号： G03F7/70716 , G03F7/70758 , G03F7/70816 , H01F7/0252
摘要： A magnetic device, comprising a first part, a second part, a first magnetic part coupled to the first part and having a first magnetic polarization, a second magnetic part coupled to the second part and having a second magnetic polarization and an additional magnetic part coupled to the first part and having an additional magnetic polarization, wherein the first magnetic part and the second magnetic part are configured to magnetically interact with each other, wherein the first magnetic part exerts a first force on the second magnetic part, the second magnetic part exerts a second force on the first magnetic part and the first force and the second force have opposite directions that are parallel to a reference direction, the first magnetic polarization is substantially parallel to the reference direction, the second magnetic polarization is substantially perpendicular to the reference direction, the additional magnetic polarization makes an angle with the first magnetic polarization and the angle has a magnitude in a range of about 90° to about 270°.
摘要翻译： 一种磁性装置，包括第一部分，第二部分，耦合到第一部分并具有第一磁极化的第一磁性部分，耦合到第二部分的第二磁性部分，并且具有第二磁极化和附加磁性部分耦合 到第一部分并且具有额外的磁极化，其中第一磁性部分和第二磁性部分被配置为彼此磁性相互作用，其中第一磁性部分在第二磁性部分上施加第一力，第二磁性部分施加 第一磁性部分上的第二力和第一力和第二力具有平行于参考方向的相反方向，第一磁极化基本上平行于参考方向，第二磁极化基本上垂直于参考方向 ，附加的磁极化与第一磁极化a成一个角度 该角度的大小在约90°至约270°的范围内。
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公开(公告)号：US10437160B2
公开(公告)日：2019-10-08
申请号：US15749226
申请日：2016-07-28
摘要： A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.
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公开(公告)号：US20150205210A1
公开(公告)日：2015-07-23
申请号：US14413667
申请日：2013-05-15
CPC分类号： G03F7/70833 , F16C32/0459 , G03F7/70058 , G03F7/704 , G03F7/70816
摘要： A support for a movable element includes a stator element, a gravity compensator field inducing element mounted on the stator element, the gravity compensator field inducing element configured to apply a translational force to the movable element by controlling a magnetic field in a gap between the stator element and the movable element, and a plurality of torque compensator field inducing elements mounted on the stator element, the torque compensator field inducing elements configured to apply a torque to the movable element by controlling a magnetic field in the gap between the stator element and the movable element, the torque being about a first axis substantially perpendicular to the direction of the translational force applied by the gravity compensator field inducing element.
摘要翻译： 可移动元件的支撑件包括定子元件，安装在定子元件上的重力补偿器场感应元件，重力补偿器场引发元件被配置为通过控制定子之间的间隙中的磁场向可移动元件施加平移力 元件和可移动元件以及安装在定子元件上的多个扭矩补偿器场诱导元件，扭矩补偿器场诱导元件被配置为通过控制定子元件和定子元件之间的间隙中的磁场向可移动元件施加扭矩 所述扭矩大约是基本上垂直于由重力补偿器场诱导元件施加的平移力的方向的第一轴线。
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公开(公告)号：US09519230B2
公开(公告)日：2016-12-13
申请号：US14415518
申请日：2013-06-18
CPC分类号： G03F7/70716 , G03F7/70758 , G03F7/70816 , H01F7/0252
摘要： A magnetic device includes first and second parts, a first magnetic part, with a first magnetic polarization, coupled to the first part, a second magnetic part, with a second magnetic polarization, coupled to the second part and an additional magnetic part coupled to the first part and having an additional magnetic polarization. The first and second magnetic parts magnetically interact with each other. The first magnetic part exerts a first force on the second magnetic part, the second magnetic part exerts a second force on the first magnetic part and the first and second forces have opposite directions that are parallel to a reference direction. The first magnetic polarization is substantially parallel to the reference direction, the second magnetic polarization is substantially perpendicular to the reference direction, the additional magnetic polarization makes an angle with the first magnetic polarization and has a magnitude in a range of about 90°-270°.
摘要翻译： 磁性装置包括第一和第二部分，具有耦合到第一部分的具有第一磁极化的第一磁性部分，具有耦合到第二部分的第二磁极化的第二磁性部分和耦合到第二部分的附加磁性部分 第一部分并具有额外的磁极化。 第一和第二磁性部件彼此磁性地相互作用。 第一磁性部件在第二磁性部件上施加第一力，第二磁性部件在第一磁性部件上施加第二力，并且第一和第二力具有与参考方向平行的相反方向。 第一磁极化基本上平行于参考方向，第二磁极化基本上垂直于参考方向，附加磁极化与第一磁极化成一个角度，并且具有大约在90°-270° 。
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