公开(公告)号：US20210018676A1

公开(公告)日：2021-01-21

申请号：US16925586

申请日：2020-07-10

Applicant: ASML NETHERLANDS B.V.

Inventor： Hendrik SABERT ,  Patrick Sebastian UEBEL

IPC: G02B6/02 ,  G01K11/32

Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.

公开(公告)号：US20210141150A1

公开(公告)日：2021-05-13

申请号：US17088201

申请日：2020-11-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Hendrik SABERT ,  Paulus Antonius Andreas TEUNISSEN

IPC: G02B6/02

Abstract: A method for manufacturing a capillary usable as part of a hollow-core photonic crystal fiber. The method includes obtaining a capillary having capillary wall including a first wall thickness; and chemically etching the capillary wall to reduce the wall thickness of the capillary wall. During performance of the etching, a control parameter is locally varied along the length of the capillary, the control parameter relating to reactivity of an etchant used in the etching, so as to control the etched wall thickness of the capillary wall along the capillary length. Also disclosed is a capillary manufactured by such a method and various devices including such a capillary.

公开(公告)号：US20220291595A1

公开(公告)日：2022-09-15

申请号：US17626852

申请日：2020-07-07

Applicant: ASML Netherlands B.V.

Inventor： Marinus Petrus REIJNDERS ,  Hendrik SABERT ,  Patrick Sebastian UEBEL

IPC: G03F7/20

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

公开(公告)号：US20240231243A1

公开(公告)日：2024-07-11

申请号：US18612659

申请日：2024-03-21

Applicant: ASML Netherlands B.V.

Inventor： Marinus Petrus REIJNDERS ,  Hendrik SABERT ,  Patrick Sebastian UEBEL

IPC: G03F7/00

CPC classification number: G03F7/70616

Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.

公开(公告)号：US20210215872A1

公开(公告)日：2021-07-15

申请号：US17128360

申请日：2020-12-21

Applicant: ASML NETHERLANDS B.V.

Inventor： Hendrik SABERT ,  Patrick Sebastian UEBEL ,  Willem Richard PONGERS

IPC: G02B6/02

Abstract: A hollow-core photonic crystal fiber (HC-PCF) assembly for converting input radiation to broadband radiation, the hollow core fiber assembly including: a micro-structured fiber with a hollow core extending along a length of the fiber from an input end configured to receive input radiation to an output end configured to output broadband radiation, wherein the hollow core of the fiber is configured to include a medium; and a density control system configured to control a density profile of the medium along at least a part of the length of the fiber to establish a desired zero dispersion wavelength profile along at least a part of the length of the fiber.