公开(公告)号：US20180340767A1

公开(公告)日：2018-11-29

申请号：US15778061

申请日：2016-11-23

Applicant: ASML NETHERLANDS B.V.

Inventor： Stoyan NIHTIANOV ,  Ruud Hendrikus Martinus Johannes BLOKS ,  Johannes Paul Marie DE LA ROSETTE ,  Thibault Simon Mathieu LAURENT ,  Kofi Afoiabi MAKINWA ,  Jacobus NEEFS ,  Johannes Petrus Martinus Bernardus VERMEULEN

IPC: G01B7/16 ,  G03F7/20 ,  G01K7/01 ,  H01L21/67

CPC classification number: G01B7/20 ,  G01K7/01 ,  G03F7/70625 ,  G03F7/7085 ,  G03F7/70866 ,  G03F7/70875 ,  H01L21/67248 ,  H01L21/67276 ,  H01L22/34

Abstract: A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.