公开(公告)号：US20230273528A1

公开(公告)日：2023-08-31

申请号：US18018034

申请日：2021-07-29

申请人： ASML NETHERLANDS B.V.

发明人： Rencheng SUN ,  Qi JIA ,  Meng LIU ,  Weixuan HU ,  Jen-Yi WUU ,  Hao CHEN

IPC分类号： G03F7/20 ,  G03F7/00 ,  G06N20/00 ,  G05B19/4099

CPC分类号： G03F7/705 ,  G03F7/70441 ,  G03F7/706841 ,  G06N20/00 ,  G05B19/4099 ,  G05B2219/45031

摘要： A method for selecting patterns for training a model to predict patterns to be printed on a substrate. The method includes (a) obtaining images of multiple patterns, wherein the multiple patterns correspond to target patterns to be printed on a substrate; (b) grouping the images into a group of special patterns and multiple groups of main patterns; and (c) outputting a set of patterns based on the images as training data for training the model, wherein the set of patterns includes the group of special patterns and a representative main pattern from each group of main patterns.

公开(公告)号：US20240037897A1

公开(公告)日：2024-02-01

申请号：US18265431

申请日：2021-11-24

申请人： ASML NETHERLANDS B.V.

发明人： Danying LI ,  Meng LIU ,  Jen-Yi WUU ,  Rencheng SUN ,  Cong WU ,  Dean XU

IPC分类号： G06V10/44 ,  G06T7/11 ,  G06V10/764

CPC分类号： G06V10/44 ,  G06T7/11 ,  G06V10/764

摘要： An apparatus and method of feature extraction for identifying a pattern. An improved method includes obtaining data representative of a pattern instance, dividing the pattern instance into a plurality of zones, determining a representative characteristic of a zone of the plurality of zones, generating a representation of the pattern instance using a feature vector, wherein the feature vector includes an element corresponding to the representative characteristic, wherein the representative characteristic is indicative of a spatial distribution of one or more features of the zone. The method may also include classifying and/or selecting pattern instances based on the feature vector.