公开(公告)号：US20170285489A1

公开(公告)日：2017-10-05

申请号：US15627054

申请日：2017-06-19

Applicant: ASML NETHERLANDS B.V.

Inventor： Marcus Adrianus VAN DE KERKHOF ,  Siebe LANDHEER ,  Marcel BECKERS ,  Jeroen Peter Johannes BRUIJSTENS ,  Ivo Adam Johannes THOMAS ,  Franciscus Johannes Joseph JANSSEN

IPC: G03F7/20 ,  G03B27/52

CPC classification number: G03F7/70341 ,  G03B27/52

Abstract: A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system has a final element. The apparatus also includes a barrier member surrounding a space between the projection system and, in use, the substrate, to define in part with the final element a reservoir for liquid. The barrier member is spaced from the final element to define a gap therebetween. The apparatus further includes a deformable seal between a radially outer surface of the final element and a radially outer surface of the barrier member. The deformable seal is configured to substantially prevent a gas from flowing past the seal towards or away from the reservoir of liquid.

公开(公告)号：US20160054647A1

公开(公告)日：2016-02-25

申请号：US14933956

申请日：2015-11-05

Applicant: ASML NETHERLANDS B.V.

Inventor： Marcus Adrianus VAN DE KERKHOF ,  Siebe LANDHEER ,  Marcel BECKERS ,  Jeroen Peter Johannes BRUIJSTENS ,  Ivo Adam Johannes THOMAS ,  Franciscus Johannes Joseph JANSSEN

IPC: G03B27/52

CPC classification number: G03F7/70341 ,  G03B27/52

Abstract: A lithographic apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system has a final element. The apparatus also includes a barrier member surrounding a space between the projection system and, in use, the substrate, to define in part with the final element a reservoir for liquid. The barrier member is spaced from the final element to define a gap therebetween. The apparatus further includes a deformable seal between a radially outer surface of the final element and a radially outer surface of the barrier member. The deformable seal is configured to substantially prevent a gas from flowing past the seal towards or away from the reservoir of liquid.