公开(公告)号：US10508896B2

公开(公告)日：2019-12-17

申请号：US15778061

申请日：2016-11-23

Applicant: ASML NETHERLANDS B.V.

Inventor： Stoyan Nihtianov ,  Ruud Hendrikus Martinus Johannes Bloks ,  Johannes Paul Marie De La Rosette ,  Thibault Simon Mathieu Laurent ,  Kofi Afolabi Anthony Makinwa ,  Patricius Jacobus Neefs ,  Johannes Petrus Martinus Bernardus Vermeulen

IPC: G01B7/00 ,  G01B7/16 ,  G03F7/20 ,  H01L21/67 ,  G01K7/01 ,  H01L21/66

Abstract: A measurement substrate for measuring a condition pertaining in an apparatus for processing production substrates during operation thereof, the measurement substrate including: a body having dimensions compatible with the apparatus; a plurality of sensor modules embedded in the body, each sensor module having: a sensor configured generate an analog measurement signal, an analog to digital converter to generate digital measurement information from the analog measurement signal, and a module controller configured to output the digital measurement information; and a central control module configured to receive the digital measurement information from each of the module controllers and to communicate the digital measurement information to an external device.