公开(公告)号：US20230341325A1

公开(公告)日：2023-10-26

申请号：US18043794

申请日：2021-08-16

Applicant: ASML NETHERLANDS B.V.

Inventor： Lars LOETGERING ,  Stefan Michiel MICHIEL ,  Christina Lynn PORTER ,  Petrus Wilhelmus SMORENBURG

IPC: G01N21/47 ,  G01N23/20025 ,  G01N23/2055 ,  G03F7/20 ,  G03F7/00

CPC classification number: G01N21/4788 ,  G01N23/20025 ,  G01N23/2055 ,  G03F7/70625 ,  G03F7/70633 ,  G03F7/70681 ,  G01N2201/021

Abstract: Disclosed is a wavefront sensor for measuring a wavefront of a radiation. The wavefront sensor comprises a mask comprising a pattern located in path of the radiation to interact with the radiation. The radiation impinging on the mask forms a radiation detection pattern on a radiation detector subsequent to the mask, and the pattern of the mask is designed at least partly based on a requirement of the radiation detection pattern.