公开(公告)号：US11740566B2

公开(公告)日：2023-08-29

申请号：US17790986

申请日：2020-12-16

申请人： ASML NETHERLANDS B.V.

发明人： Paulus Albertus Van Hal ,  Adrianus Hendrik Koevoets ,  Beatriz Seoane De La Cuesta

IPC分类号： G03F7/20 ,  H01L21/687 ,  G03F7/00

CPC分类号： G03F7/7095 ,  G03F7/707 ,  G03F7/70783 ,  H01L21/6875

摘要： A substrate with a backside surface configured to provide a friction switch when the substrate is loaded onto a substrate holder in a substrate-loading cycle, wherein the substrate backside surface has a molecular assembly including at least one high-interaction region and at least one low-interaction region. Further, there is provided methods using such a substrate and methods for creating such a substrate.