公开(公告)号：US11099490B2

公开(公告)日：2021-08-24

申请号：US16310537

申请日：2017-06-15

Applicant: ASML NETHERLANDS B.V.

Inventor： Jeroen Arnoldus Leonardus Johannes Raaymakers ,  Peter Johannes Antonius Raedts ,  Miao Yu

IPC: G03F7/20 ,  H01L21/66 ,  H01L21/67

Abstract: An inspection substrate for inspecting a component of an apparatus for processing production substrates, the inspection substrate having: a body having dimensions similar to the production substrates so that the inspection substrate is compatible with the apparatus; a sensor configured to generate inspection information relating to a parameter of the component of the apparatus, the sensor embedded in the body; a control detector embedded in the body and configured to detect a control signal transmitted by the apparatus for processing production substrates; and a controller embedded in the body and configured to control the sensor in response to detection of the control signal.