公开(公告)号：US20170108783A1

公开(公告)日：2017-04-20

申请号：US15315885

申请日：2015-05-13

Applicant: ASML Netherlands B.V.

Inventor： Pieter Jacob KRAMER ,  Rogier Sebastiaan GILIJAMSE ,  Niels LAMMERS ,  Daan Maurits SLOTBOOM

IPC: G03F7/20

CPC classification number: G03F9/7046 ,  G03F7/70141 ,  G03F7/70483 ,  G03F7/70525 ,  G03F7/706 ,  G03F7/70633 ,  G03F7/70775 ,  G03F9/7003 ,  G03F9/7049 ,  G03F9/7073

Abstract: A method including determining a position of a first pattern in each of a plurality of target portions on a substrate, based on a fitted mathematical model, wherein the first pattern includes at least one alignment mark, wherein the mathematical model is fitted to a plurality of alignment mark displacements (dx, dy) for the alignment marks in the target portions, and wherein the alignment mark displacements are a difference between a respective nominal position of the alignment mark and measured position of the alignment mark; and transferring a second pattern onto each of the target portions, using the determined position of the first pattern in each of the plurality of target portions, wherein the mathematical model includes polynomials Z1 and Z2: Z1=r2 cos(2θ) and Z2=r2 sin(2θ) in polar coordinates (r, θ) or Z1=x2−y2 and Z2=xy in Cartesian coordinates (x, y).

公开(公告)号：US20230176487A1

公开(公告)日：2023-06-08

申请号：US17922580

申请日：2021-05-03

Applicant: ASML NETHERLANDS B.V.

Inventor： Rogier Sebastiaan GILIJAMSE ,  Johan Gertrudis Cornelis KUNNEN ,  Marco Adrianus Peter VAN DEN HEUVEL ,  Boogyeong Zoo

IPC: G03F7/20

CPC classification number: G03F7/70533 ,  G03F7/7085 ,  G03F7/70783

Abstract: A substrate support system is provided that includes: a support part configured to support a bottom surface of a substrate on a support plane; a moveable part moveable between a retracted position, in which a top end of the moveable part is below the support plane, and an extended position, in which the top end of the moveable part is above the support plane, such that the top end supports the bottom surface of the substrate above the support plane in the extended position; and a measurement system configured to measure a time taken for the moveable part to move from the retracted position to the extended position, to compare the measured time with a reference time, and to generate a signal when the measured time deviates from the reference time by more than a predetermined amount.