公开(公告)号：US20210132517A1

公开(公告)日：2021-05-06

申请号：US16472712

申请日：2017-11-27

Applicant: ASML NETHERLANDS B.V.

Inventor： Andrey NIKIPELOV ,  Vadim Yevgenyevich BANINE ,  Joost André KLUGKIST ,  Maxim Aleksandrovich NASALEVICH ,  Roland Johannes Wilhelmus STAS ,  WRICKE Sandro

IPC: G03F9/00

Abstract: A lithographic apparatus has an object, the object includes: a substrate and optionally a lower layer on the substrate; an upper layer; and an intermediate layer between the upper layer and the substrate, wherein a bond strength between the intermediate layer and the substrate or lower layer is greater than a bond strength between the intermediate layer and the upper layer and the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.