公开(公告)号：US20160252827A1

公开(公告)日：2016-09-01

申请号：US15028676

申请日：2014-09-25

Applicant: ASML NETHERLANDS B.V.

Inventor： Hans BUTLER ,  Ramidin Izair KAMIDI ,  Yanin KASEMSINSUP

IPC: G03F7/20 ,  G01B11/00 ,  G01B9/02

CPC classification number: G03F7/70775 ,  G01B9/02 ,  G01B11/002 ,  G03F7/70725

Abstract: An object positioning system includes an object; a measurement system to measure the position of the object, wherein each sensor of the measurement system has an associated measurement area on the object and wherein a location of at least one measurement area on the object is dependent on the position of the object; an actuator system to position the object; a control system configured to drive the actuator system, wherein the control system includes an observer with a dynamic model of the object to estimate an internal dynamic behavior of the object, wherein the dynamic model includes the dependency of the location of at least one measurement area on the position of the object, and wherein the control system is configured to drive the actuator system in dependency of an output of the observer.

Abstract translation: 物体定位系统包括物体; 用于测量所述物体的位置的测量系统，其中所述测量系统的每个传感器在所述物体上具有相关联的测量区域，并且其中所述物体上的至少一个测量区域的位置取决于所述物体的位置; 用于定位物体的致动器系统; 配置成驱动所述致动器系统的控制系统，其中所述控制系统包括具有所述物体的动态模型的观察者以估计所述物体的内部动态行为，其中所述动态模型包括至少一个测量区域的位置的依赖性 在所述对象的位置上，并且其中所述控制系统被配置为依照所述观察者的输出来驱动所述致动器系统。