公开(公告)号：US20150015863A1

公开(公告)日：2015-01-15

申请号：US14383359

申请日：2013-02-07

Applicant: ASML Netherland B.V.

Inventor： Antonius Theodorus Wilhelmus Kempen ,  John Frederik Dijkusman ,  Jan Jan Meastrom

IPC: H05G2/00 ,  B05B17/06 ,  G03F7/20

CPC classification number: H05G2/006 ,  B05B17/0653 ,  G03F7/70033 ,  G03F7/70058 ,  G03F7/7085 ,  G03F7/709 ,  G03F7/70916

Abstract: The present invention provides a method of monitoring the operation of a radiation source fuel droplet stream generator comprising a fuel-containing capillary and a piezo-electric actuator (500). The method comprises analysing the resonance frequency spectrum of a system comprising the fuel-containing capillary and the piezo-electric actuator in particular to look for changes in the resonance frequencies of the acoustic system which may be indicative of a change in the properties of the system requiring investigation.

Abstract translation: 本发明提供一种监测包括含燃料毛细管和压电致动器（500）的辐射源燃料液滴流发生器的操作的方法。 该方法包括分析包括含燃料的毛细管和压电致动器的系统的共振频谱，以寻找声学系统的共振频率的变化，其可以指示系统的性质的变化 需要调查。