公开(公告)号：US20240242930A1

公开(公告)日：2024-07-18

申请号：US18563841

申请日：2022-05-18

Applicant: ASML Netherlands B.V.

Inventor： Jan BEX ,  Nickolay STEPANENKO ,  Matthias OBERST ,  Harald Gert Helmut NEUBAUER ,  Thomas SCHWEIGER ,  Florian Alfons STIEGLITZ ,  Bernd Michael VOLLMER

IPC: H01J37/244 ,  G01T1/24 ,  G01T1/29

CPC classification number: H01J37/244 ,  G01T1/24 ,  G01T1/2928 ,  H01J2237/2441

Abstract: A charged particle detector may include a plurality of sensing elements formed in a substrate, wherein a sensing element of the plurality of sensing elements is formed of a first region on a first side of the substrate, and a second region on a second side of the substrate, the second side being opposite to the first side. The detector may also include a plurality of third regions formed on the second side of the substrate, the third regions including one or more circuit components. The detector may also include an array of fourth regions formed on the second side of the substrate, the array of fourth regions being between adjacent third regions.