公开(公告)号：US20230010985A1

公开(公告)日：2023-01-12

申请号：US17782696

申请日：2020-12-02

Applicant: ASML Netherlands B.V.

Inventor： Pooriya Beyhaghi ,  Charles Edward Kinney ,  Bob Rollinger ,  Joshua Mark Lukens

IPC: H05G2/00

Abstract: A method includes ejecting initial droplets of a material using a nozzle. The method includes applying a pressure on the nozzle using an electromechanical element. The method includes controlling the applied pressure on the nozzle using an electrical signal generated by a waveform generator. The electrical signal includes a first periodic waveform and a second periodic waveform. The method includes coalescing the initial droplets to generate coalesced droplets based on the first and second periodic waveforms and drag. The method includes generating a detection signal, using a detector, corresponding to time intervals between crossings of coalesced droplets at the detector. The method includes determining at least first and second ones of the time intervals using a processor.