公开(公告)号：US20220361310A1

公开(公告)日：2022-11-10

申请号：US17432985

申请日：2020-02-06

Applicant: ASML Netherlands B.V.

Inventor： Pooriya Beyhaghi ,  Bob Rollinger

IPC: H05G2/00 ,  G03F7/20

Abstract: Apparatus for and method of controlling formation of droplets used to generate EUV radiation. The droplet source includes a fluid exiting an nozzle and a sub-system having an electro-actuatable element producing a disturbance in the fluid. The droplet source produces a stream that breaks down into droplets that in turn coalesce into larger droplets as they progress towards the irradiation region. The electro-actuatable element is driven by a control signal having a sine wave component and a square wave component. Various parameters such as a phase difference between the sine wave component and the square wave component are measured and controlled to minimize the formation of noncoalesced satellite droplets in the stream.

公开(公告)号：US11240904B2

公开(公告)日：2022-02-01

申请号：US16960947

申请日：2019-01-03

Applicant: ASML Netherlands B.V.

Inventor： Joshua Mark Lukens ,  Bob Rollinger ,  Pooriya Beyhaghi

IPC: H05G2/00

Abstract: Provided is an apparatus for and method of controlling formation of droplets (102a, b) used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source (92) includes a fluid exiting an nozzle (98) and a sub-system having an electro-actuatable element (104) producing a disturbance in the fluid (96). The droplet source produces a stream (100) that breaks down into droplets that in turn coalesce into larger droplets as they progress towards the irradiation region. The electro-actuatable element is driven by a hybrid waveform that controls the droplet generation/coalescence process. Also disclosed is a method of determining the transfer function for the nozzle.

公开(公告)号：US20230010985A1

公开(公告)日：2023-01-12

申请号：US17782696

申请日：2020-12-02

Applicant: ASML Netherlands B.V.

Inventor： Pooriya Beyhaghi ,  Charles Edward Kinney ,  Bob Rollinger ,  Joshua Mark Lukens

IPC: H05G2/00

Abstract: A method includes ejecting initial droplets of a material using a nozzle. The method includes applying a pressure on the nozzle using an electromechanical element. The method includes controlling the applied pressure on the nozzle using an electrical signal generated by a waveform generator. The electrical signal includes a first periodic waveform and a second periodic waveform. The method includes coalescing the initial droplets to generate coalesced droplets based on the first and second periodic waveforms and drag. The method includes generating a detection signal, using a detector, corresponding to time intervals between crossings of coalesced droplets at the detector. The method includes determining at least first and second ones of the time intervals using a processor.

公开(公告)号：US20200344867A1

公开(公告)日：2020-10-29

申请号：US16960947

申请日：2019-01-03

Applicant: ASML Netherlands B.V.

Inventor： Joshua Mark Lukens ,  Bob Rollinger ,  Pooriya Beyhaghi

IPC: H05G2/00

Abstract: Provided is an apparatus for and method of controlling formation of droplets (102a, b) used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source (92) includes a fluid exiting an nozzle (98) and a sub-system having an electro-actuatable element (104) producing a disturbance in the fluid (96). The droplet source produces a stream (100) that breaks down into droplets that in turn coalesce into larger droplets as they progress towards the irradiation region. The electro-actuatable element is driven by a hybrid waveform that controls the droplet generation/coalescence process. Also disclosed is a method of determining the transfer function for the nozzle.