公开(公告)号：US20210223696A1

公开(公告)日：2021-07-22

申请号：US16334381

申请日：2017-08-23

Applicant: ASML Netherlands B.V.

Inventor： Satish ACHANTA ,  Wilhelmus Jacobus Johannes WELTERS ,  Abraham Alexander SOETHOUDT ,  Jelmer Mattheüs KAMMINGA ,  Christian LIEDECKE

IPC: G03F7/16 ,  C23C16/458 ,  H01L21/67 ,  H01L21/687

Abstract: A substrate, a substrate holder, a substrate coating apparatus, a method for coating the substrate and a method for removing the coating. A monomolecular layer is applied to the backside of the substrate or a clamp surface of the substrate holder. The friction force between the substrate backside and the substrate is small when the substrate does not experience full clamping force. After loading the substrate on the substrate holder full clamping force is exerted in order to fix the substrate. The clamping force causes local removal of the monomolecular layer, resulting in an increase of the friction force between the substrate and the substrate holder.