公开(公告)号：US20160029471A1

公开(公告)日：2016-01-28

申请号：US14874164

申请日：2015-10-02

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  Robert Jay Rafac ,  Igor Vladimirovich Fomenkov ,  Daniel John William Brown ,  Daniel James Golich

IPC: H05G2/00

CPC classification number: H05G2/008 ,  G21K5/02 ,  H01S3/10 ,  H05G2/005

Abstract: Techniques for forming a target and for producing extreme ultraviolet light include releasing an initial target material toward a target location, the target material including a material that emits extreme ultraviolet (EUV) light when converted to plasma; directing a first amplified light beam toward the initial target material, the first amplified light beam having an energy sufficient to form a collection of pieces of target material from the initial target material, each of the pieces being smaller than the initial target material and being spatially distributed throughout a hemisphere shaped volume; and directing a second amplified light beam toward the collection of pieces to convert the pieces of target material to plasma that emits EUV light.

公开(公告)号：US09462668B2

公开(公告)日：2016-10-04

申请号：US14874164

申请日：2015-10-02

Applicant: ASML Netherlands B.V.

Inventor： Yezheng Tao ,  Robert Jay Rafac ,  Igor Vladimirovich Fomenkov ,  Daniel John William Brown ,  Daniel James Golich

IPC: H05G2/00 ,  H01S3/10 ,  G21K5/02

CPC classification number: H05G2/008 ,  G21K5/02 ,  H01S3/10 ,  H05G2/005

Abstract: Techniques for forming a target and for producing extreme ultraviolet light include releasing an initial target material toward a target location, the target material including a material that emits extreme ultraviolet (EUV) light when converted to plasma; directing a first amplified light beam toward the initial target material, the first amplified light beam having an energy sufficient to form a collection of pieces of target material from the initial target material, each of the pieces being smaller than the initial target material and being spatially distributed throughout a hemisphere shaped volume; and directing a second amplified light beam toward the collection of pieces to convert the pieces of target material to plasma that emits EUV light.