公开(公告)号：US11953837B2

公开(公告)日：2024-04-09

申请号：US17423818

申请日：2019-11-05

Applicant: ASML Netherlands B.V.

Inventor： Thomas Poiesz ,  Michel Ben Isel Habets ,  Abraham Alexander Soethoudt ,  Herman Marquart

IPC: G03F7/00

CPC classification number: G03F7/70783 ,  G03F7/70033

Abstract: The present invention provides a testing substrate (W) for estimating stress in production substrates due to a substrate support, said testing substrate having a support surface (SS) divided into predefined portions, wherein the predefined portions comprise at least one first portion (1) having a first coefficient of friction being substantially uniform across the at least one first portion, and at least one second portion (2) having a second coefficient of friction being substantially uniform across the at least one second portion, wherein the second coefficient of friction is different to the first coefficient of friction. The present invention also provides a method for estimating stress in a substrate due to a substrate support and a system for making such an estimation.

公开(公告)号：US20250157849A1

公开(公告)日：2025-05-15

申请号：US19026708

申请日：2025-01-17

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Josephus MAASSEN ,  André Schreuder ,  Herman Marquart

IPC: H01L21/687 ,  G03F7/00

Abstract: A substrate holder including: a main body having a main body surface; a plurality of burls projecting from the main body surface and configured for supporting the substrate; and an edge seal projecting from the main body surface; wherein: the edge seal is spaced apart from the plurality of burls so as to define a gap therebetween, the gap having a width greater than or equal to about 75% of a pitch of the plurality of burls; the plurality of burls includes a first group of burls and a second group of burls surrounding the first group of burls; and wherein the stiffness in the direction perpendicular to the support plane per unit area of the second group of burls is greater than or equal to about 150% of the stiffness in the direction perpendicular to the support plane per unit area of the first group of burls.

公开(公告)号：US12243768B2

公开(公告)日：2025-03-04

申请号：US17421085

申请日：2019-12-13

Applicant: ASML NETHERLANDS B.V.

Inventor： Johannes Josephus Maassen ,  André Schreuder ,  Herman Marquart

IPC: H01L21/687 ,  G03F7/00

Abstract: A substrate holder including: a main body having a main body surface; a plurality of burls projecting from the main body surface and configured for supporting the substrate; and an edge seal projecting from the main body surface, wherein: the edge seal is spaced apart from the plurality of burls so as to define a gap therebetween, the gap having a width greater than or equal to about 75% of a pitch of the plurality of burls; the plurality of burls includes a first group of burls and a second group of burls surrounding the first group of burls; and the stiffness in the direction perpendicular to the support plane per unit area of the second group of burls is greater than or equal to about 150% of the stiffness in the direction perpendicular to the support plane per unit area of the first group of burls.