公开(公告)号：US09835950B2

公开(公告)日：2017-12-05

申请号：US15112602

申请日：2014-12-19

Applicant: ASML Netherlands B.V.

Inventor： Markus Franciscus Antonius Eurlings ,  Niek Antonius Jacobus Maria Kleemans ,  Antonius Johannes Josephus Van Dijsseldonk ,  Ramon Mark Hofstra ,  Oscar Franciscus Jozephus Noordman ,  Tien Nang Pham ,  Jan Bernard Plechelmus Van Schoot ,  Jiun-Cheng Wang ,  Kevin Weimin Zhang

IPC: G03B27/54 ,  G03B27/72 ,  H05G2/00 ,  G03F7/20 ,  G02B27/09 ,  G02B19/00

CPC classification number: G03F7/70091 ,  G02B19/0019 ,  G02B27/0905 ,  G02B27/0983 ,  G03F7/70033 ,  G03F7/70175 ,  H05G2/005 ,  H05G2/008

Abstract: A faceted reflector (32, 32″) for receiving an incident radiation beam (2) and directing a reflected radiation beam at a target. The faceted reflector comprises a plurality of facets, each of the plurality of facets comprising a reflective surface. The reflective surfaces of each of a first subset of the plurality of facets define respective parts of a first continuous surface and are arranged to reflect respective first portions of the incident radiation beam in a first direction to provide a first portion of the reflected radiation beam. The reflective surfaces of each of a second subset of the plurality of facets define respective parts of a second continuous surface and are arranged to reflect respective second portions of the incident radiation beam in a second direction to provide a second portion of the reflected radiation beam.