公开(公告)号：US20170241914A1

公开(公告)日：2017-08-24

申请号：US15506850

申请日：2015-08-27

Applicant: ASML Netherlands B.V.

Inventor： Martijn Petrus Christianus VAN HEUMEN ,  Sergii DENEGA ,  Ralph Jozef Johannes Gerardus Anna Maria SMEETS ,  Remco Marcel VAN DIJK ,  Marc VAN KEMENADE

IPC: G01N21/88 ,  H01J65/04 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G03F7/70033 ,  G03F7/70575 ,  G03F7/70616 ,  H01J65/04

Abstract: Disclosed is a laser-driven photon source comprising drive optics which focus drive radiation so as to maintain a plasma. The point spread function of the drive optics has a point spread function (75) which is configured such that a spectral position of a peak output wavelength of a black body portion of output radiation emitted by said plasma within a desired wavelength band.