公开(公告)号：US12085862B2

公开(公告)日：2024-09-10

申请号：US17633643

申请日：2020-08-14

Applicant: ASML Netherlands B.V.

Inventor： Matthew Ryan Graham ,  Spencer Rich ,  Sean W. McGrogan

IPC: G03F7/20 ,  G03F7/00 ,  H05G2/00

CPC classification number: G03F7/70266 ,  G03F7/70033 ,  H05G2/008

Abstract: Disclosed is an apparatus and a method in which off-droplet measurements instead of on-droplet measurements of prepulse energy are used for pulse energy control. Prepulse energy is measured during an off-droplet nonexposure period and controlled to a prepulse energy setpoint. The prepulse energy can then be controlled open-loop to the prepulse energy setpoint during on-droplet periods. This effectively decouples the EUV dose control loop from the prepulse energy control loop and avoids negative side effects of coupling such loops, for example, loss of the part of the dose adjustment range available to the dose controller.

公开(公告)号：US20220317576A1

公开(公告)日：2022-10-06

申请号：US17633643

申请日：2020-08-14

Applicant: ASML Netherlands B.V.

Inventor： Matthew Ryan Graham ,  Spencer Rich ,  Sean W. McGrogan

IPC: G03F7/20 ,  H05G2/00

Abstract: Disclosed is an apparatus and a method in which off-droplet measurements instead of on-droplet measurements of prepulse energy are used for pulse energy control. Prepulse energy is measured during an off-droplet nonexposure period and controlled to a prepulse energy setpoint. The prepulse energy can then be controlled open-loop to the prepulse energy setpoint during on-droplet periods. This effectively decouples the EUV dose control loop from the prepulse energy control loop and avoids negative side effects of coupling such loops, for example, loss of the part of the dose adjustment range available to the dose controller.