公开(公告)号：US12085862B2

公开(公告)日：2024-09-10

申请号：US17633643

申请日：2020-08-14

Applicant: ASML Netherlands B.V.

Inventor： Matthew Ryan Graham ,  Spencer Rich ,  Sean W. McGrogan

IPC: G03F7/20 ,  G03F7/00 ,  H05G2/00

CPC classification number: G03F7/70266 ,  G03F7/70033 ,  H05G2/008

Abstract: Disclosed is an apparatus and a method in which off-droplet measurements instead of on-droplet measurements of prepulse energy are used for pulse energy control. Prepulse energy is measured during an off-droplet nonexposure period and controlled to a prepulse energy setpoint. The prepulse energy can then be controlled open-loop to the prepulse energy setpoint during on-droplet periods. This effectively decouples the EUV dose control loop from the prepulse energy control loop and avoids negative side effects of coupling such loops, for example, loss of the part of the dose adjustment range available to the dose controller.

公开(公告)号：US20230269858A1

公开(公告)日：2023-08-24

申请号：US18010251

申请日：2021-06-08

Applicant: ASML Netherlands B.V.

Inventor： Poorya Haghi ,  Sean W. McGrogan ,  Robert N. Jacques ,  Daniel Jason Riggs ,  Liane Manuela Matthes

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  G03F7/70033 ,  H05G2/005

Abstract: Systems, apparatuses, and methods are provided for steering aligning a laser beam and a fuel target. An example method can include generating, at a first rate, first sensing data indicative of a first overlap between a fuel target and a laser beam. The example method can further include generating, at a second rate, second sensing data indicative of a second overlap between the fuel target and the laser beam. The method can further include generating, at a third rate, and based on the first sensing data and the second sensing data, a steering control signal configured to steer the laser beam or the fuel target. In some aspects, the second rate can be different from the first rate, and the third rate can be about equal to the first rate. In other aspects, the first rate and the second rate can be about equal to the third rate.

公开(公告)号：US20220317576A1

公开(公告)日：2022-10-06

申请号：US17633643

申请日：2020-08-14

Applicant: ASML Netherlands B.V.

Inventor： Matthew Ryan Graham ,  Spencer Rich ,  Sean W. McGrogan

IPC: G03F7/20 ,  H05G2/00

Abstract: Disclosed is an apparatus and a method in which off-droplet measurements instead of on-droplet measurements of prepulse energy are used for pulse energy control. Prepulse energy is measured during an off-droplet nonexposure period and controlled to a prepulse energy setpoint. The prepulse energy can then be controlled open-loop to the prepulse energy setpoint during on-droplet periods. This effectively decouples the EUV dose control loop from the prepulse energy control loop and avoids negative side effects of coupling such loops, for example, loss of the part of the dose adjustment range available to the dose controller.