公开(公告)号：US20180239252A1

公开(公告)日：2018-08-23

申请号：US15525626

申请日：2015-11-04

申请人： ASML Netherlands B.V.

发明人： Han-Kwang NIENHUYS ,  Sjoerd Nicolaas Lambertus DONDERS ,  Gosse Charles DE VRIES ,  Michael Josef Mathijs RENKENS ,  Erik Roelof LOOPSTRA

IPC分类号： G03F7/20

CPC分类号： G03F7/70891 ,  G02B5/1838 ,  G02B5/1861 ,  G02B7/1815 ,  G03F7/2008 ,  G03F7/70266 ,  G03F7/7095

摘要： A reflector (2) comprising a plate (4) supported by a substrate (8), wherein the plate has a reflective surface (5) and is secured to the substrate by adhesive free bonding, and wherein a cooling channel array (10) is provided in the reflector. The channels (16) of the cooling channel array may be formed from open channels in a surface of the substrate, the open channels being closed by the plate to create the channels.