公开(公告)号：US20250003899A1

公开(公告)日：2025-01-02

申请号：US18708929

申请日：2022-10-14

Applicant: ASML Netherlands B.V.

Inventor： Tim HOUBEN ,  Maxim PISARENCO ,  Thomas Jarik HUISMAN ,  Lingling PU ,  Jian ZHOU ,  Liangjiang YU ,  Yi-Hsin CHANG ,  Yun-Ling YEH

IPC: G01N23/2251 ,  G06T7/00

Abstract: Systems and methods for image analysis include obtaining a plurality of simulation images and a plurality of non-simulation images both associated with a sample under inspection, at least one of the plurality of simulation images being a simulation image of a location on the sample not imaged by any of the plurality of non-simulation images; and training an unsupervised domain adaptation technique using the plurality of simulation images and the plurality of non-simulation images as inputs to reduce a difference between first intensity gradients of the plurality of simulation images and second intensity gradients of the plurality of non-simulation images.

公开(公告)号：US20240054669A1

公开(公告)日：2024-02-15

申请号：US18266792

申请日：2021-11-24

Applicant: ASML NETHERLANDS B.V.

Inventor： Tim HOUBEN ,  Thomas Jarik HUISMAN ,  Maxim PISARENCO ,  Scott Anderson MIDDLEBROOKS ,  Chrysostomos BATISTAKIS ,  Yu CAO

IPC: G06T7/593 ,  G06T5/50 ,  G06T7/13

CPC classification number: G06T7/593 ,  G06T5/50 ,  G06T7/13 ,  G06T2207/10061 ,  G06T2207/20084 ,  G06T2207/10012 ,  G06T2207/20212 ,  G06T2207/20081 ,  G06T2207/30148

Abstract: A system, method, and apparatus for determining three-dimensional (3D) information of a structure of a patterned substrate. The 3D information can be determined using one or more models configured to generate 3D information (e.g., depth information) using only a single image of a patterned substrate. In a method, the model is trained by obtaining a pair of stereo images of a structure of a patterned substrate. The model generates, using a first image of the pair of stereo images as input, disparity data between the first image and a second image, the disparity data being indicative of depth information associated with the first image. The disparity data is combined with the second image to generate a reconstructed image corresponding to the first image. Further, one or more model parameters are adjusted based on the disparity data, the reconstructed image, and the first image.